Materials - Zinc oxide conducting films (TCO)

Zinc oxide conducting films (TCO)

Description

Conducting ZnO layers are deposited by atomic layer deposition (ALD) on range of available substrates, at growth temperature up to 200 ^oC. We determined growth parameters ensuring optimal electrical parameters of the films (low film resistivities) and metallic conductivity at room temperature. Conducting ZnO films have high optical transmission in the visible range. Thus, such films can be used as transparent electrodes in a range of electronics, photovoltaics and optoelectronics devices.

Parameters

Film thicknesses: < 1 micrometer
Optical transmission: ~90 %
Carrier type: n
Resistivity: 1-2x10^-3Ωcm
High uniformity

Applications

transparent electrodes
organic electronics

Optical transmission of 200-nm thick conducting ZnO films grown on glass by ALD

Resistivities of 200-nm thick ZnO films grown by ALD at various growth temperatures