Characterization - EDX measurements of elemental composition
and distribution

EDX measurements of elemental composition
and distribution


Energy dispersive X-ray spectroscopy - EDX is based on the characteristic radiation which is emitted from sample under high-energy electron beam bombardment. This method enables us to do very fast analysis of chemical composition in solids, especially semiconductors (also with wide band-gap) and semi-insulating materials. Integration with high resolution scanning electron microscope enables studies of correlation of the surface morphology with distribution of elements in sample.


EDX analysis provides:

  • Quantitative analysis of chemical composition: spectra collected from desired point, along assigned line or selected area on the sample
  • Studies of the elements distribution in sample in the form of maps coupled with microscopic image



  • Elements identification: heavier than Be
  • Energetic resolution: 130 eV (FWHM) –  Mn Kα
  • Detection limit: 0.1– 0.3 %
  • Spatial resolution - low Z: 1-5 µm3, high Z: 0.2 – 1 µm3
  • Maximum diameter of sample: 5 inches
  • Thermo Scientific UltraDry Silicon Drift Detector with Noran System 7 analysis system integrated with Hitachi SU-70 Scanning Electron Microscope

Scanning electron Microscope Hitachi SU-70.

Line scan of the multilayer sample CdPbTe.

Elements distribution maps.