Characterization - EDX measurements of elemental composition
and distribution
EDX measurements of elemental composition and distribution
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DescriptionEnergy dispersive X-ray spectroscopy - EDX is based on the characteristic radiation which is emitted from sample under high-energy electron beam bombardment. This method enables us to do very fast analysis of chemical composition in solids, especially semiconductors (also with wide band-gap) and semi-insulating materials. Integration with high resolution scanning electron microscope enables studies of correlation of the surface morphology with distribution of elements in sample. EDX analysis provides:- Quantitative analysis of chemical composition: spectra collected from desired point, along assigned line or selected area on the sample
- Studies of the elements distribution in sample in the form of maps coupled with microscopic image
Parameters:- Elements identification: heavier than Be
- Energetic resolution: 130 eV (FWHM) – Mn Kα
- Detection limit: 0.1– 0.3 %
- Spatial resolution - low Z: 1-5 µm3, high Z: 0.2 – 1 µm3
- Maximum diameter of sample: 5 inches
- Thermo Scientific UltraDry Silicon Drift Detector with Noran System 7 analysis system integrated with Hitachi SU-70 Scanning Electron Microscope
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Scanning electron Microscope Hitachi SU-70.
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Line scan of the multilayer sample CdPbTe.
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Elements distribution maps.
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