Characterization - Transmission Electron Microscopy (TEM)

Transmission Electron Microscopy (TEM)


In the Laboratory of Electron Microscopy (PME), the structure and chemical composition of solids are investigated. The Laboratory is equipped with a transmission electron microscope FEI Titan 80-300 Cubed  and a dual beam scanning microscope Helios-NanoLab. The Helios-NanoLab 600 is used for FIB sample preparation for transmission electron microscopy as well as for other tasks such as the determining the elemental composition of samples (EDXS)  or nanolithography by focused gallium ions beam (FIB). PME performs two test procedures covered by the accreditation of the PCA. 


  • Transmission Electron Microscopy (TEM) and High Resolution TEM (HRTEM) imaging
  • Scanning Transmission Electron Microscopy (STEM), Z-contrast imaging
  • EDX analysis
  • High energy resolution EELS analysis
  • Electron holography
  • Lorentz microscopy



  • Acceleration voltage : 60 - 300 kV
  • TEM resolution (information limit): 90 pm
  • STEM/HAADF resolution: 0.136 nm
  • Resolution Lorentz microscopy 5 nm
  •  Electron energy loss resolution 0.2 eV at 300 kV
  •  Double tilt low noise LN2 cooled holder
  • Sample preparation with use of ion etching: Ar+ ions, 200-6 keV, 0-10o, LN2 cooling
  • TEM sample sizes: diameter 3.05 mm, thickness max 0.34 mm


Investigated materials

semiconductor epitaxial heterostructures (GaN, Si, Ga(Mn)As, CdZnTe, SnPbTe, SiC on Si), materials for spinelectronics ((Ga, Mn)Sb, (Cu, Co)ZnO, (Cd, Zn, Mn, Mg)Te, (Mg,Zn)Se), nanowires (ZnTe, ZnTe/CdTe, GaAs, (In, Mn)GaAs, SnPbTe), nonoparticles (ZnO, Ag, Au, Pd, Pt, Fe2O3, Fe3O4), biological materials.




Titan Cubed 80-300 and Helios NanoLab microscopes.

High resolution image of the core of misfit dislocation on the GaAs/GaSb interface (Titan 80-300).

Process of lame cutting from thin carbon-platinum thin film (Helios-NanoLab).